International Research Center for Renewable Energy, State Key laboratory of Multiphase Flow in Power Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China ...
Abstract: Silicon nitride (SiN) hard mask (HM) has been investigated to achieve sub-100nm of high aspect ratio (HAR) pattern. In this study, SiN HM trimming technique is developed by mean of cyclic ...
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